Description

optical vacuum metalizing & coating machine, the most high technical and complicate product,mainly for optical products by optical film, The optically film production process can be satisfied well by use of every systematic units and overall structure.

Application

optical vacuum coating machine is applied in high accuracy of optical components, optical communication products and optical film coating system, such as electrical film, metal film, laser film, cold film, beam splitting film, anti-reflection film, band-pass film, anti-reflection film, cut-off film on the various filters, glass slide and plastic components, etc.

Features

1. High accuracy of film thickness control system
2. Excellent performance electronic gun
3. High degree of automatic coating film control system.

Parameters

Model	ZZS-1100	ZZS-1300	ZZS-1500	ZZS-1800
Vacuum chamber	Φ1100 × 1300 mm, 304 Stainless steel	Φ1300 × 1500 mm, 304 Stainless steel	Φ1500 × 1600 mm, 304 Stainless steel	Φ1800 × 1800 mm, 304 Stainless steel
Workpiece Plate	Φ1030 mm	Φ1200 mm	Φ1400 mm	Φ1700 mm
Vacuum System	Mechanical pump 1pcs + Diffusion pump 2pcs + Maintaining pump 1pcs + Roots pump 1pcs + Freon cold trap 1pcs	Mechanical pump 2pcs + Diffusion pump 2pcs + Maintaining pump 1pcs + Roots pump 1pcs + Polycold (Double end)	Mechanical pump 2pcs + Diffusion pump 2pcs + Maintaining pump 1pcs + Roots pump 1pcs + Polycold (Double end)	Mechanical pump 2pcs + Diffusion pump 2pcs + Maintaining pump 1pcs + Roots pump 1pcs + Polycold (Double end)
Baking Temperature	Tubular heater enclosure layout, the maximum temperature 350℃
Evaporation Source	2pcs electron gun, 6 kW, Type E 270℃, single power supply	2pcs electron gun, 6 kW, Type E 270℃, single power supply	2pcs electron gun, 8 kW, Type E 270℃, single power supply	2pcs electron gun, 8 to 10 kW, Type E 270℃, single power supply
Optical Film Thickness Control	1pcs optical special power, 1pcs optical film thickness control device, 1pcs grating monochromator, the range of wave length 380 to 1100nm, transmission/reflection
Quartz Crystal Control	SQC310, XTC-3 or IC/6
Ion Source	Kaufman or Hall source
Electrical Automatic Control	The equipment adopts color touch screen system + PLC control, it has good machine interface and control function. It is matched with crystal control to realize process automation.
Ultimate Vacuum	Below 3 ×10-4Pa	Below 3 ×10-4Pa	Below 3 ×10-4Pa	Below 3 ×10-4Pa
Recovery Vacuum	Atms. to 4 ×10-3 Pa ≤15 min	Atms. to 4 ×10-3 Pa ≤15 min	Atms. to 4 ×10-3 Pa ≤15 min	Atms .to 4 ×10-3 Pa ≤15 min
Way of Control	Manual + Automatic	Manual + Automatic	Manual + Automatic	Manual + Automatic
Working Conditions
Dimension of the Equipment	About 3000 mm(L) × 1350 mm(W) × 2900 mm(H)	About 3500mm(L) × 1500mm(W) × 3100mm(H)	About 4500mm(L) × 2000mm(W) × 3000mm(H)	About 6000mm(L) × 2800mm(W) × 3200mm(H)
Power Supply	3 phase, 380V; 50Hz,about 60kW	3 phase, 380V; 50Hz,about 70kW	3 phase, 380V; 50Hz,about 80kW	3 phase, 380V; 50Hz,about 95kW
Circulating Water Pressure	0.15 to 0.3MPa	0.15 to 0.4MPa	0.15 to 0.4MPa	0.15 to 0.45MPa
Compressed Air Pressure	Above 0.5MPa	Above 0.5MPa	Above 0.5MPa	Above 0.5MPa
Weight (kg)	About 4000 kg	About 5000 kg	About 6500 kg	About 7500 kg