Description

The ZBS ultra-high vacuum gate valve (vacuum valves) is mainly used to connect or cut-off connection air flow in the ultra-high vacuum and the high vacuum series system.

Characteristic of Vacuum Valves

The ultra-high vacuum gate valve features low ratio of leakage, big air flow, long lifetime, and good performance. It is convenient to maintain.

Features of Vacuum Valves

1. ZBS Series ultra-high vacuum gate valve adopts auto lock sealing principle of multi steel ball pressure.
2. This machine is divided for electric-type drive and pneumatic-type drive.

Parameters of Vacuum Valves

The range of Working Pressure	1 × 10-7 to 1 × 10-5 (Absolute)
The Leak Ratio of Valve	Valve body ＜1 × 10-7
The Permit Pressure Differential of Both Side in Sealing Gate Valve	1 × 10-5Pa (Positive, Negative Direction)
The Permit Maximum Open Pressure Differential of Sealing Gate Valve	1 to 1 × 10-5Pa (Positive, Negative Direction)
Baking Temperature	Valve body ＜ 150℃, Driving part ＜ 60℃
Lifetime (At least one maintenance)	10000 times open and close
The Position of Installation	Φ100 to Φ320 any direction, Φ400v to Φ1320 according to the indicated direction
The Connection of Flange	1. Φ100 to Φ250, according to the national standard GB6071.2~85 or GB6070.3 to 85 2. Φ320 to Φ1320, according to the national standard GB6070.3 to 85 3. According to customer's requirements